Analysis of Test Structure Design Induced Variation in on Si On-wafer TRL Calibration in sub-THz

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Authors: Chandan Yadav, Sebastien Fregonese, Marina Deng, Marco Cabbia, Magali De Matos, Mathieu Jaoul, Thomas Zimmer

Journal title: 2019 IEEE 32nd International Conference on Microelectronic Test Structures (ICMTS)

Journal publisher: IEEE

Published year: 2019

Published pages: 132-136

DOI identifier: 10.1109/icmts.2019.8730962

ISBN: 978-1-7281-1466-8