(Invited) Nickel and Nickel-Platinum Silicide for BiCMOS Devices

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Authors: Dirk Wolansky, Jean-Paul Blaschke, Jürgen Drews, Thomas Grabolla, Bernd Heinemann, Thomas Lenke, Holger Rücker, Markus Andreas Schubert, Sebastian Schulze, Heinz-Peter Stoll, Marvin Zöllner, Uwe Richter, Dan Deyo

Journal title: ECS Transactions

Journal number: 98/5

Journal publisher: ECS

Published year: 2020

Published pages: 351-361

DOI identifier: 10.1149/09805.0351ecst

ISSN: 1938-6737