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Authors: Guylaine Poulin-Vittrant, Abhishek S. Dahiya, Sarah Boubenia, Kevin Nadaud, François Morini, Camille Justeau, Daniel Alquier
Journal title: Materials Science in Semiconductor Processing
Journal number: 91
Journal publisher: Pergamon Press
Published year: 2019
Published pages: 404-408
DOI identifier: 10.1016/j.mssp.2018.12.013
ISSN: 1369-8001