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Authors: Sascha Migura, Winfried Kaiser, Jens Timo Neumann, Hartmut Enkisch, and Dirk Hellweg
Journal title: Chapter 5: Optics for EUVL
Journal publisher: SPIE Publications
Published year: 2018
Published pages: 225-333
DOI identifier: 10.1117/3.2305675
ISBN: 9781-510616783
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