Modeling of Tone Inversion Process Flow for N5 Interconnect to Characterize Block Tip to Tip

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Authors: S. Guissi, W. F. Clark, A. Junker, J. Ervin, K. Greiner, D. Fried, B. Briggs, K. Devriendt, F. Sebaai, A. Charley, C. J. Wilson, J. Boemmels, Z. Tőkei

Journal title: Proceedings of IEEE IITC INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE

Journal publisher: IEEE

Published year: 2017