Laser Annealing Simulations of Metallisations Deposited on 4H-SiC

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Authors: Clement Berger, Jean François Michaud, David Chouteau, Daniel Alquier

Journal title: Materials Science Forum

Journal number: 963

Journal publisher: Proc. of European Conference of Silicon Carbide and Related Materials (ECSCRM2018)

Published year: 2019

Published pages: 502-505

DOI identifier: 10.4028/www.scientific.net/msf.963.502

ISSN: 1662-9752