Thermal Annealing of High Dose P Implantation in 4H-SiC

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: Cristiano Calabretta, Massimo Zimbone, Eric G. Barbagiovanni, Simona Boninelli, Nicolò Piluso, Andrea Severino, Maria Ausilia di Stefano, Simona Lorenti, Lucia Calcagno, Francesco La Via

Journal title: Materials Science Forum

Journal number: 963

Journal publisher: Trans Tech Pub.

Published year: 2019

Published pages: 399-402

DOI identifier: 10.4028/www.scientific.net/msf.963.399

ISSN: 1662-9752