Laser Annealing of P and Al Implanted 4H-SiC Epitaxial Layers

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Authors: Cristiano Calabretta, Marta Agati, Massimo Zimbone, Simona Boninelli, Andrea Castiello, Alessandro Pecora, Guglielmo Fortunato, Lucia Calcagno, Lorenzo Torrisi, Francesco La Via

Journal title: Materials

Journal number: 12/20

Journal publisher: MDPI Open Access Publishing

Published year: 2019

Published pages: 3362

DOI identifier: 10.3390/ma12203362

ISSN: 1996-1944