Summary
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Authors: Patrick Fiorenza, Marilena Vivona, Ferdinando Iucolano, Andrea Severino, Simona Lorenti, Giuseppe Nicotra, Corrado Bongiorno, Filippo Giannazzo, Fabrizio Roccaforte
Journal title: Materials Science in Semiconductor Processing
Journal number: 78
Journal publisher: Pergamon Press
Published year: 2018
Published pages: 38-42
DOI identifier: 10.1016/j.mssp.2017.11.024
ISSN: 1369-8001