Double Step Annealing for the Recovering of Ion Implantation Defectiveness in 4H-SiC DIMOSFET

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Authors: Massimo Zimbone, Nicolò Piluso, Grazia Litrico, Roberta Nipoti, Riccardo Reitano, Maria Concetta Canino, Maria Ausilia di Stefano, Simona Lorenti, Francesco La Via

Journal title: Materials Science Forum

Journal number: 924

Journal publisher: Scientific.Net

Published year: 2018

Published pages: 357-360

DOI identifier: 10.4028/www.scientific.net/MSF.924.357

ISSN: 1662-9752