Morphological and electrical properties of Nickel based Ohmic contacts formed by laser annealing process on n-type 4H-SiC

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Authors: S. Rascunà, P. Badalà, C. Tringali, C. Bongiorno, E. Smecca, A. Alberti, S. Di Franco, F. Giannazzo, G. Greco, F. Roccaforte, M. Saggio

Journal title: Materials Science in Semiconductor Processing

Journal number: 97

Journal publisher: Pergamon Press

Published year: 2019

Published pages: 62-66

DOI identifier: 10.1016/j.mssp.2019.02.031

ISSN: 1369-8001