Design, Modelling, and Characterization of Display Compatible pMUT Device

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Authors: Huang, Chih-Hsien; Hang, Gao; Torri, Guilherme Brondani; Mao, Shengping; Jeong, Yongbin; Cheyns, David; Rochus, Veronique; Rottenberg, Xavier

Journal title: 2018 19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)

Journal number: 15-18 April 2018

Journal publisher: IEEE

Published year: 2018

Published pages: 4

ISBN: 978-1-5386-2359-6