Mechanical Characterization of MEMS-Microphones by Means of Nanoindentation and Coupled Finite Element Analysis

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Authors: Jan Albrecht ; Marie Weissbach ; Matthias Vobl ; Ulrich Krumbein ; Sven Rzepka

Journal title: 2018 IEEE 20th Electronics Packaging Technology Conference

Journal number: 4-7 December 2018

Journal publisher: IEEE

Published year: 2018

Published pages: 580-584

DOI identifier: 10.1109/eptc.2018.8654382

ISBN: 978-1-5386-7668-4