Summary
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Authors: Pieter Gijsenbergh, Alexandre Halbach, Yongbin Jeong, Guilherme Brondani Torri, Margo Billen, Libertario Demi, Chih-Hsien Huang, David Cheyns, Xavier Rottenberg, Veronique Rochus
Journal title: Journal of Micromechanics and Microengineering
Journal number: 29/7
Journal publisher: Institute of Physics Publishing
Published year: 2019
Published pages: 074001
DOI identifier: 10.1088/1361-6439/ab1f41
ISSN: 0960-1317