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Authors: Sebastian Anzinger, Fabian Lickert, Alessandra Fusco, Gabriele Bosetti, David Tumpold, Christian Bretthauer, Alfons Dehe
Journal title: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
Journal number: 18-22 January 2020
Journal publisher: IEEE
Published year: 2020
Published pages: 853-856
DOI identifier: 10.1109/mems46641.2020.9056182
ISBN: 978-1-7281-3581-6