Broadband Acoustical MEMS Transceivers for Simultaneous Range Finding and Microphone Applications

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Authors: Sebastian Anzinger, Christian Bretthauer, Johannes Manz, Ulrich Krumbein, Alfons Dehe

Journal title: 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)

Journal number: 23-27 June 2019

Journal publisher: IEEE

Published year: 2019

Published pages: 865-868

DOI identifier: 10.1109/transducers.2019.8808264

ISBN: 978-1-5386-8104-6