Heavy Ion Irradiation Effects on Structural and Ferroelectric Properties of HfO 2 Films

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Authors: T. Kampfe, T. Vogel, R. Olivo, M. Lederer, N. Kaiser, S. Petzold, T. Ali, D. Lehninger, C. Trautmann, L. Alff, K. Seidel

Journal title: 2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)

Journal publisher: IEEE

Published year: 2020

Published pages: 1-3

DOI identifier: 10.1109/ifcs-isaf41089.2020.9234942

ISBN: 978-1-7281-6430-4