Room temperature PVD TiN to improve the ferroelectric properties of HZO films in the BEoL

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Authors: David Lehninger, Konstantin Mertens, Lukas Gerlich, Maximilian Lederer, Tarek Ali, Konrad Seidel

Journal title: MRS Advances

Journal number: 6/21

Journal publisher: Springer

Published year: 2021

Published pages: 535-539

DOI identifier: 10.1557/s43580-021-00118-w

ISSN: 2059-8521