Impact of Bottom Electrode Integration on OxRAM Arrays Variability

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Authors: N.-P. Tran, J. Sandrini, A. Persico, J.-F. Nodin, T. Magis, R. Crochemore, N. Castellani, M.-C. Cyrille, G. Molas, E. Nowak

Journal title: 2020 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA)

Journal publisher: IEEE

Published year: 2020

Published pages: 33-34

DOI identifier: 10.1109/vlsi-tsa48913.2020.9203694

ISBN: 978-1-7281-4232-6