Defect-Induced Phase Transition in Hafnium Oxide Thin Films: Comparing Heavy Ion Irradiation and Oxygen-Engineering Effects

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Authors: Tobias Vogel, Nico Kaiser, Stefan Petzold, Eszter Piros, Nicolas Guillaume, Gauthier Lefevre, Christelle Charpin-Nicolle, Sylvain David, Christophe Vallee, Etienne Nowak, Christina Trautmann, Lambert Alff

Journal title: IEEE Transactions on Nuclear Science

Journal number: 68/8

Journal publisher: Institute of Electrical and Electronics Engineers

Published year: 2021

Published pages: 1542-1547

DOI identifier: 10.1109/tns.2021.3085962

ISSN: 0018-9499