Process influences on the microstructure of BEoL integrated ferroelectric hafnium zirconium oxide

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Authors: Maximilian Lederer, David Lehninger, Sukhrob Abdulazhanov, Andre Reck, Ricardo Olivo, Thomas Kampfe, Konrad Seidel

Journal title: 2021 IEEE International Symposium on Applications of Ferroelectrics (ISAF)

Journal publisher: IEEE

Published year: 2021

Published pages: 1-4

DOI identifier: 10.1109/isaf51943.2021.9477392

ISBN: 978-1-6654-0444-0