Back‐End‐of‐Line Compatible Low‐Temperature Furnace Anneal for Ferroelectric Hafnium Zirconium Oxide Formation

Summary

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: David Lehninger, Ricardo Olivo, Tarek Ali, Maximilian Lederer, Thomas Kämpfe, Clemens Mart, Kati Biedermann, Kati Kühnel, Lisa Roy, Mahsa Kalkani, Konrad Seidel

Journal title: physica status solidi (a)

Journal number: 217/8

Journal publisher: Wiley - V C H Verlag GmbbH & Co.

Published year: 2020

Published pages: 1900840

DOI identifier: 10.1002/pssa.201900840

ISSN: 1862-6300