Local crystallographic phase detection and texture mapping in ferroelectric Zr doped HfO2 films by transmission-EBSD

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Authors: M. Lederer, T. Kämpfe, R. Olivo, D. Lehninger, C. Mart, S. Kirbach, T. Ali, P. Polakowski, L. Roy, and K. Seidel

Journal title: Appl. Phys. Lett.

Journal publisher: American Institute of Physics

Published year: 2019

DOI identifier: 10.1063/1.5129318

ISSN: 0003-6951