"A novel silicon ""star-comb"" microphone concept for enhanced signal-to-noise-ratio: Modeling, design and first prototype"

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Authors: Johannes Manz, Gabriele Bosetti, Alfons Dehe, Gabriele Schrag

Journal title: 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Journal publisher: IEEE

Published year: 2017

Published pages: 67-70

DOI identifier: 10.1109/TRANSDUCERS.2017.7993989

ISBN: 978-1-5386-2732-7