Advanced Technology Processes for Manufacturing of SnO<inf>2</inf> and NiO-Based Gas Sensors and Their Properties

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Authors: R. Wimmer-Teubenbacher, S. Defregger, R. Boiger, A. Kock, I. Hotovy, M. Mikolasek, M. Predanocy, G. Toschkoff

Journal title: 2018 12th International Conference on Advanced Semiconductor Devices and Microsystems (ASDAM)

Journal publisher: IEEE

Published year: 2018

Published pages: 1-5

DOI identifier: 10.1109/asdam.2018.8544639

ISBN: 978-1-5386-7490-1