Nanoindentation and Coupled Finite Element Analysis for Robustness and Design Evaluation of MEMS-Microphones

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Authors: Albrecht, J., Weissbach, M., Vobl, M., Krumbein, U., & Rzepka, S

Journal title: Nanoindentation and Coupled Finite Element Analysis for Robustness and Design Evaluation of MEMS-Microphones

Journal publisher: IEEE

Published year: 2018

Published pages: 225

ISBN: 978-1-5386-7488-8