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Authors: L-M Faller, W Granig, M Krivec, A Abram, H Zangl
Journal title: Journal of Micromechanics and Microengineering
Journal number: 28/10
Journal publisher: Institute of Physics Publishing
Published year: 2018
Published pages: 104002
DOI identifier: 10.1088/1361-6439/aaadf4
ISSN: 0960-1317