Modeling of an out-of-plane capacitive MEMS transducer with dynamically coupled electrodes

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Authors: Gabriele Bosetti, Johannes Manz, Gabriele Schrag, Alfons Dehe

Journal title: 2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)

Journal publisher: IEEE

Published year: 2017

Published pages: 1-5

DOI identifier: 10.1109/dtip.2017.7984459

ISBN: 978-1-5386-2952-9