Non-Linear Bulk Micromachined Accelerometer for High Sensitivity Applications

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Authors: L.M. Middelburg, B. El Mansouri, Rene Poelma, G.Q. Zhang, Henk Van Zeijl, Jia Wei

Journal title: 2018 IEEE SENSORS

Journal publisher: IEEE

Published year: 2018

Published pages: 1-4

DOI identifier: 10.1109/icsens.2018.8589630

ISBN: 978-1-5386-4707-3