Designing a 100 [aF/nm] capacitive transducer

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Authors: L. M. Middelburg, B. El Mansouri, R. H. Poelma, H. W. van Zeijl, J. Wei, G. Q. Zhang, W. D. van Driel

Journal title: 2018 19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)

Journal publisher: IEEE

Published year: 2018

Published pages: 1-3

DOI identifier: 10.1109/eurosime.2018.8369954

ISBN: 978-1-5386-2359-6