Modeling high signal-to-noise ratio in a novel silicon MEMS microphone with comb readout

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Authors: Johannes Manz, Alfons Dehe, Gabriele Schrag

Journal title: Smart Sensors, Actuators, and MEMS VIII

Journal publisher: SPIE

Published year: 2017

Published pages: 1024608

DOI identifier: 10.1117/12.2266014