Electrical characterization of single nanometer-wide Si fins in dense arrays

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Authors: Steven Folkersma, Janusz Bogdanowicz, Andreas Schulze, Paola Favia, Dirch H Petersen, Ole Hansen, Henrik H Henrichsen, Peter F Nielsen, Lior Shiv, Wilfried Vandervorst

Journal title: Beilstein Journal of Nanotechnology

Journal number: 9

Journal publisher: Beilstein-Institut Zur Forderung der Chemischen Wissenschaften

Published year: 2018

Published pages: 1863-1867

DOI identifier: 10.3762/bjnano.9.178

ISSN: 2190-4286