Down to 15nm BOX: SOI extendability for planar fully depleted application beyond 22FD

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Authors: W. Schwarzenbach, F. Allibert, C. Le Royer, L. Grenouillet, C. Malaquin, C. Bertrand-Giuliani, F. Boedt, S. Loubriat, C. Michau, D. Parissi, B.-Y. Nguyen

Journal title: 2016 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)

Journal publisher: IEEE

Published year: 2016

Published pages: 1-2

DOI identifier: 10.1109/S3S.2016.7804377

ISBN: 978-1-5090-4391-0