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Authors: Drescher, Maximilian; Erben, Elke; Grass, Carsten; Trentzsch, Martin; Lazarevic, Florian; Leitsmann, Roman; Plaenitz, Philipp; Mchedlidze, Teimuraz; Seidel, Konrad; Liske, Romy; Bartha, Johann Wolfgang
Journal title: MikroSystemTechnik Kongress 2017
Journal number: MikroSystemTechnik Kongress 2017
Journal publisher: MikroSystemTechnik Kongress 2017
Published year: 2017
Published pages: pp.774-776
ISBN: 978-3-8007-4491-6