Charakterisierung der Zuverlässigkeit in der High-k Metal Gate Technologie (Reliability characterization in High-k metal gate technology)

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Authors: Seidel, Konrad; Riedel, Stefan; Kalishettyhalli Ma, Mamathamba; Polakowski, Patrick; Müller, Johannes

Journal title: MikroSystemTechnik Kongress 2017

Journal number: MikroSystemTechnik Kongress 2017

Journal publisher: MikroSystemTechnik Kongress 2017

Published year: 2017

Published pages: pp.488-491

ISBN: 978-3-8007-4491-6