Differential Reflective Metrology An innovative variability measurement for advanced FDSOI material

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Authors: J.-M. Billiez, W. Schwarzenbach

Journal title: 2020 21st International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)

Journal publisher: IEEE

Published year: 2020

Published pages: 1-2

DOI identifier: 10.1109/eurosime48426.2020.9152621

ISBN: 978-1-7281-6049-8