Strain Modification of PECVD Nitride By Plasma Immersion Ion Implantation Processes

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Authors: Laurent Lachal, Christophe Plantier, Franck Torregrosa, Cedric Aubert, Jean-Michel Pedini, Gael Borvon, Marianne Coig, Frederic Milesi, Heimanu Niebojewski, Frédéric Mazen

Journal title: ECS Transactions

Journal number: 97/3

Journal publisher: The Electrochemical Society

Published year: 2020

Published pages: 93-99

DOI identifier: 10.1149/09703.0093ecst

ISSN: 1938-6737