Multi-patterning strategies for navigating the sub-5 nm frontier, part 2

Summary

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: Jae Uk Lee, Ryoung-han Kim, David Abercrombie, Rehab Kotb Ali, Ahmed Hamed-Fatehy

Journal publisher: EDN Network

Published year: 2019