Sub-40mV Sigma-VTH IGZO nFETs in 300mm Fab

Summary

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Authors: Jerome Mitard, Luka Kljucar, Nouredine Rassoul, Harold F. W. Dekkers, Michiel van Setten, Adrian Chasin, Geoffrey Pourtois, Attilio Belmonte, Romain Delhougne, Gabriele Luca Donadio, Ludovic Goux, Manoj Nag, Chris Wilson, Zsolt Tokei, Jose Ignacio del agua Borniquel, Soeren Steudel and Gouri Sankar Kar

Journal title: ECS Transactions

Journal number: 98 (7)

Journal publisher: The Electrochemical Society

Published year: 2020

Published pages: 205-217