Exploring patterning limit and enhancement techniques to improve printability of 2D shapes at 3nm node

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Authors: Rehab Kotb Ali, Ahmed Hamed Fatehy, James Word

Journal title: Design-Process-Technology Co-optimization for Manufacturability XIV

Journal publisher: SPIE

Published year: 2020

Published pages: 33

DOI identifier: 10.1117/12.2552091

ISBN: 9781510634244