High-NA EUV Optics –the Key for Miniaturizationof Integrated Circuitsin the Next Decade

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: Bartosz Bilski, Heiko Feldmann, Paul Gräupner, Peter Kürz, Winfried Kaiser

Journal publisher: ESSCIRC/ESSDERC 2019, Cracow, Poland

Published year: 2019