The future of EUV lithography: enabling Moore's Law in the next decade
Project: TAKE5
Updated at: 29-04-2024
Resources
5625 items found
EUV for HVM: towards an industrialized scanner for HVM NXE3400B performance update
Project: TAKE5
Updated at: 29-04-2024
Special Section Guest Editorial: EUV Lithography for the 3-nm Node and Beyond
Project: TAKE5
Updated at: 29-04-2024
Diffuser concepts for in-situ wavefront measurements of EUV projection optics
Project: TAKE5
Updated at: 29-04-2024
High NA EUV lithography: Next step in EUV imaging
Project: TAKE5
Updated at: 29-04-2024
Edge placement error control and Mask3D effects in High-NA anamorphic EUV lithography
Project: TAKE5
Updated at: 29-04-2024
High-NA EUV lithography exposure tool progress (Conference Presentation)
Project: TAKE5
Updated at: 29-04-2024
The future of EUV lithography: continuing Moore's Law into the next decade
Project: TAKE5
Updated at: 29-04-2024
High-NA EUV lithography enabling Moore’s law in the next decade
Project: TAKE5
Updated at: 29-04-2024
Verfahren und Vorrichtung zur Reinigung von Bauteilen für die EUV-Mikrolithographie
Project: TAKE5
Updated at: 29-04-2024
PCT/IL2016/051350
Project: TAKE5
Updated at: 29-04-2024
Mirror array
Project: TAKE5
Updated at: 29-04-2024
COOLING APPARATUS AND PLASMA-CLEANING STATION FOR COOLING APPARATUS
Project: TAKE5
Updated at: 29-04-2024
Using Multiple Sources/Detectors for High-Throughput X-Ray Topography Measurement
Project: TAKE5
Updated at: 29-04-2024
Angle calibration for GIXRF
Project: TAKE5
Updated at: 29-04-2024
Lithographic apparatus
Project: TAKE5
Updated at: 29-04-2024
Lithographic apparatus
Project: TAKE5
Updated at: 29-04-2024
Verfahren zum Vermessen eines Beleuchtungssystems einer Projektionsbelichtungsanlage für die Mikrolithographie
Project: TAKE5
Updated at: 29-04-2024
double-coolingwater all ULE clamp
Project: TAKE5
Updated at: 29-04-2024
H2 topcooling/ H2 bearing to prevent burlslip and reduce Overlay
Project: TAKE5
Updated at: 29-04-2024
Pupillenfacettenspiegel
Project: TAKE5
Updated at: 29-04-2024
EUV LITHOGRAPHY SYSTEM
Project: TAKE5
Updated at: 29-04-2024
Wafer cooling hood
Project: TAKE5
Updated at: 29-04-2024
A suite of promotional material develop for the project
Project: CSA-Industy4.E
Updated at: 29-04-2024
Develop an Industry4.E public engagement and outreach strategy
Project: CSA-Industy4.E
Updated at: 29-04-2024
Industry4.E dissemination and exploitation strategy
Project: CSA-Industy4.E
Updated at: 29-04-2024
Report presenting the operational platform
Project: CSA-Industy4.E
Updated at: 29-04-2024
Report on Industrial digitalisation roadmap gaps identification
Project: CSA-Industy4.E
Updated at: 29-04-2024
Result and analysis of KPIs
Project: CSA-Industy4.E
Updated at: 29-04-2024
Report on the public engagement activities carried out in the project
Project: CSA-Industy4.E
Updated at: 29-04-2024