High-NA EUV Optics – The key for miniaturization of integrated circuits in the next decade
Project: TAPES3
Updated at: 29-04-2024
Resources
5625 items found
Verfahren zur Korrektur einer Baugruppe einer Mikrolithographieanlage
Project: TAPES3
Updated at: 29-04-2024
GAS MIXING FOR FAST TEMPERATURE CONTROL OF A COOLING HOOD
Project: TAPES3
Updated at: 29-04-2024
Perspectives and tradeoffs of absorber materials for high NA EUV lithography
Project: TAPES3
Updated at: 29-04-2024
SALELE process from theory to fabrication
Project: TAPES3
Updated at: 29-04-2024
Multi-patterning strategies for navigating the sub-5 nm frontier, part 2
Project: TAPES3
Updated at: 29-04-2024
Techniques for SAMP cut/block mask design decomposition
Project: TAPES3
Updated at: 29-04-2024
Progress in High NA EUV Optics Development of sub-10nm resolution
Project: TAPES3
Updated at: 29-04-2024
Better prediction on patterning failure mode with hotspot aware OPC modeling
Project: TAPES3
Updated at: 29-04-2024
Very-High Dynamic Range, 10,000 Frames/Second Pixel Array Detector for Electron Microscopy
Project: TAPES3
Updated at: 29-04-2024
High NA EUV optics: preparing lithography for the next big step
Project: TAPES3
Updated at: 29-04-2024
Study of EUV reticle storage effects through exposure on EBL2 and NXE
Project: TAPES3
Updated at: 29-04-2024
Periodic Reporting for period 3 - TAPES3 (Technology Advances for Pilotline of Enhanced Semiconductors for 3nm)
Project: TAPES3
Updated at: 29-04-2024
Mask absorber development to enable next-generation EUVL
Project: TAPES3
Updated at: 29-04-2024
SCHWINGUNGSTILGER, OPTISCHES SYSTEM UND LITHOGRAPHIEANLAGE
Project: TAPES3
Updated at: 29-04-2024
Report on annual networking events 2019 and 2020
Project: COSMOS
Updated at: 29-04-2024
Validated final Implementation Plan
Project: COSMOS
Updated at: 29-04-2024
Report on 4 networking sessions organised
Project: COSMOS
Updated at: 29-04-2024
ABSTÜTZEN EINER KOMPONENTE EINER OPTISCHEN ABBILDUNGSEINRICHTUNG
Project: PIN3S
Updated at: 29-04-2024
FLUID PURGING SYSTEM
Project: PIN3S
Updated at: 29-04-2024
NETZWERK FÜR EINE LITHOGRAPHIEANLAGE, LITHOGRAPHIEANLAGE UND VERFAHREN ZUM BETREIBEN EINES NETZWERKS
Project: PIN3S
Updated at: 29-04-2024
OPTISCHES SYSTEM, LITHOGRAPHIEANLAGE UND VERFAHREN ZUM BETREIBEN EINES OPTISCHEN SYSTEMS
Project: PIN3S
Updated at: 29-04-2024
Kontaktierung einer elektrischen Komponente in einem optischen Element
Project: PIN3S
Updated at: 29-04-2024
ADAPTIVE OPTICAL ELEMENT FOR MICROLITHOGRAPHY
Project: PIN3S
Updated at: 29-04-2024
THERMISCHE AKTUATORANORDNUNG
Project: PIN3S
Updated at: 29-04-2024
FLUID PURGING SYSTEM
Project: PIN3S
Updated at: 29-04-2024
Verfahren zur Herstellung eines Kühlkörpers für eine Baugruppe eines optischen Systems
Project: PIN3S
Updated at: 29-04-2024
Managing latency in edge–cloud environment
Project: FITOPTIVIS
Updated at: 29-04-2024
A Deployment Framework for Quality-Sensitive Applications in Resource-Constrained Dynamic Environments
Project: FITOPTIVIS
Updated at: 29-04-2024
DTRiMC tool for TE0820-02-3CG-1E module on TE0701-06 carrier board
Project: FITOPTIVIS
Updated at: 29-04-2024