Final pilot evaluation reports
Project: NextPerception
Updated at: 29-04-2024
Resources
5625 items found
Spatio-temporal algorithm for 3D sequences noise reduction
Project: NextPerception
Updated at: 29-04-2024
On the prediction of air quality within vehicles using outdoor air pollution: sensors and machine learning algorithms
Project: NextPerception
Updated at: 29-04-2024
VLSI Keynote: EUVL - Optics: Status and Future Perspectives
Project: TAPES3
Updated at: 29-04-2024
Optics for EUV Lithography
Project: TAPES3
Updated at: 29-04-2024
Characterization and Mitigation of 3D Mask Effects in Extreme Ultraviolet Lithography
Project: TAPES3
Updated at: 29-04-2024
Realizing more accurate OPC models by utilizing SEM contours
Project: TAPES3
Updated at: 29-04-2024
First results of EUV-scanner compatibility tests performed on novel 'high-NA' reticle absorber materials
Project: TAPES3
Updated at: 29-04-2024
Self-aligned block technology: a step toward further scaling
Project: TAPES3
Updated at: 29-04-2024
Reducing extreme ultraviolet mask three-dimensional effects by alternative metal absorbers
Project: TAPES3
Updated at: 29-04-2024
High-NA EUV Lithography Exposure System - Advantages and Program Progress
Project: TAPES3
Updated at: 29-04-2024
Self-aligned multi-patterning Track decomposition techniques
Project: TAPES3
Updated at: 29-04-2024
Implementation of different cost functions for EUV mask optimization for next generation beyond 7nm
Project: TAPES3
Updated at: 29-04-2024
A LITHOGRAPHIC APPARATUS AND COOLING APPARATUS
Project: TAPES3
Updated at: 29-04-2024
SYSTEM AND METHOD FOR SIMULTANEOUS PHASE CONTRAST IMAGING AND ELECTRON ENERGY-LOSS SPECTROSCOPY
Project: TAPES3
Updated at: 29-04-2024
Dynamics of crosshatch patterns in heteroepitaxy
Project: TAPES3
Updated at: 29-04-2024
Controlling the relaxation mechanism of low strain Si1−xGex/Si(001) layers and reducing the threading dislocation dens...
Project: TAPES3
Updated at: 29-04-2024
Additional real-time diagnostics on the EBL2 EUV exposure facility
Project: TAPES3
Updated at: 29-04-2024
Optical design of EUV attenuated PSM for contact-hole applications
Project: TAPES3
Updated at: 29-04-2024
Sub-40mV Sigma-VTH IGZO nFETs in 300mm Fab
Project: TAPES3
Updated at: 29-04-2024
Multi-patterning strategies for navigating the sub-5 nm frontier, part 3
Project: TAPES3
Updated at: 29-04-2024
Probability prediction of EUV process failure due to resist-exposure stochastic: applications of Gaussian random fields ...
Project: TAPES3
Updated at: 29-04-2024
Investigation into a prototype EUV attenuated phase-shift mask
Project: TAPES3
Updated at: 29-04-2024
Mask absorber for next generation EUV lithography
Project: TAPES3
Updated at: 29-04-2024
Exploring patterning limit and enhancement techniques to improve printability of 2D shapes at 3nm node
Project: TAPES3
Updated at: 29-04-2024
High-NA EUV lithography optics becomes reality
Project: TAPES3
Updated at: 29-04-2024
High-NA EUV Lithography Exposure Tool - Advantages and Program Progress
Project: TAPES3
Updated at: 29-04-2024
High-NA EUV Optics –the Key for Miniaturizationof Integrated Circuitsin the Next Decade
Project: TAPES3
Updated at: 29-04-2024
Multi-patterning strategies for navigating the sub-5 nm frontier, part 1
Project: TAPES3
Updated at: 29-04-2024
Comparing multi-patterning at 5nm: SADP, SAQP, and SALELE
Project: TAPES3
Updated at: 29-04-2024