Optical design of EUV attenuated PSM for contact-hole applications
Project: TAPES3
Updated at: 29-04-2024
Resources
5627 items found
High-NA EUV Lithography Exposure Tool - Advantages and Program Progress
Project: TAPES3
Updated at: 29-04-2024
High-NA EUV Optics – The key for miniaturization of integrated circuits in the next decade
Project: TAPES3
Updated at: 29-04-2024
Multi-patterning strategies for navigating the sub-5 nm frontier, part 1
Project: TAPES3
Updated at: 29-04-2024
Multi-patterning strategies for navigating the sub-5 nm frontier, part 3
Project: TAPES3
Updated at: 29-04-2024
High-NA EUV Optics –the Key for Miniaturizationof Integrated Circuitsin the Next Decade
Project: TAPES3
Updated at: 29-04-2024
Verfahren zur Korrektur einer Baugruppe einer Mikrolithographieanlage
Project: TAPES3
Updated at: 29-04-2024
GAS MIXING FOR FAST TEMPERATURE CONTROL OF A COOLING HOOD
Project: TAPES3
Updated at: 29-04-2024
Perspectives and tradeoffs of absorber materials for high NA EUV lithography
Project: TAPES3
Updated at: 29-04-2024
SALELE process from theory to fabrication
Project: TAPES3
Updated at: 29-04-2024
Techniques for SAMP cut/block mask design decomposition
Project: TAPES3
Updated at: 29-04-2024
Progress in High NA EUV Optics Development of sub-10nm resolution
Project: TAPES3
Updated at: 29-04-2024
Multi-patterning strategies for navigating the sub-5 nm frontier, part 2
Project: TAPES3
Updated at: 29-04-2024
Very-High Dynamic Range, 10,000 Frames/Second Pixel Array Detector for Electron Microscopy
Project: TAPES3
Updated at: 29-04-2024
Better prediction on patterning failure mode with hotspot aware OPC modeling
Project: TAPES3
Updated at: 29-04-2024
Study of EUV reticle storage effects through exposure on EBL2 and NXE
Project: TAPES3
Updated at: 29-04-2024
High NA EUV optics: preparing lithography for the next big step
Project: TAPES3
Updated at: 29-04-2024
Periodic Reporting for period 3 - TAPES3 (Technology Advances for Pilotline of Enhanced Semiconductors for 3nm)
Project: TAPES3
Updated at: 29-04-2024
SCHWINGUNGSTILGER, OPTISCHES SYSTEM UND LITHOGRAPHIEANLAGE
Project: TAPES3
Updated at: 29-04-2024
Mask absorber development to enable next-generation EUVL
Project: TAPES3
Updated at: 29-04-2024
Report on annual networking events 2019 and 2020
Project: COSMOS
Updated at: 29-04-2024
Validated final Implementation Plan
Project: COSMOS
Updated at: 29-04-2024
Report on 4 networking sessions organised
Project: COSMOS
Updated at: 29-04-2024
THERMISCHE AKTUATORANORDNUNG
Project: PIN3S
Updated at: 29-04-2024
OPTISCHES SYSTEM, LITHOGRAPHIEANLAGE UND VERFAHREN ZUM BETREIBEN EINES OPTISCHEN SYSTEMS
Project: PIN3S
Updated at: 29-04-2024
NETZWERK FÜR EINE LITHOGRAPHIEANLAGE, LITHOGRAPHIEANLAGE UND VERFAHREN ZUM BETREIBEN EINES NETZWERKS
Project: PIN3S
Updated at: 29-04-2024
FLUID PURGING SYSTEM
Project: PIN3S
Updated at: 29-04-2024
ABSTÜTZEN EINER KOMPONENTE EINER OPTISCHEN ABBILDUNGSEINRICHTUNG
Project: PIN3S
Updated at: 29-04-2024
Kontaktierung einer elektrischen Komponente in einem optischen Element
Project: PIN3S
Updated at: 29-04-2024
ADAPTIVE OPTICAL ELEMENT FOR MICROLITHOGRAPHY
Project: PIN3S
Updated at: 29-04-2024